Linear Electromagnetic Actuator

ABSTRACT

First and second projections are formed to protrude toward a guide rail from both sides of a slide table. Third and fourth projections are formed to protrude toward the slide table from both sides of the guide rail. A plurality of balls are arranged in clearances between the first and second projections and the third and fourth projections.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a linear electromagnetic actuatorcomprising a permanent magnet and a coil which face each other todisplace the permanent magnet by the thrust force generated by thecurrent allowed to flow through the coil.

2. Description of the Related Art

In a linear electromagnetic actuator of the movable magnet type, apermanent magnet and a coil which face each other displace the permanentmagnet by the thrust force which is generated based on the Fleming'sleft hand rule when the current is allowed to flow through the coil (seeJapanese Laid-Open Patent Publication Nos. 5-227729 and 10-290560).

In the linear electromagnetic actuator disclosed in Japanese Laid-OpenPatent Publication Nos. 5-227729 and 10-290560, the permanent magnet isfixed to a first yoke, and the first yoke is supported by a slider.Meanwhile, the coil is fixed to a second yoke, and the second yoke issupported by a guide rail. Further, a guide member is interposed betweenthe slider and the guide rail.

A magnetic path passing through the permanent magnet, the first yoke,the clearance between the first yoke and the second yoke, the secondyoke, the coil, the gap between the coil and the permanent magnet, andthe permanent magnet, is formed by the permanent magnet in the linearelectromagnetic actuator. When the current is allowed to flow throughthe coil, a magnetic path of the coil, the gap between the coil and thepermanent magnet, the permanent magnet, the first yoke, the clearancebetween the first yoke and the second yoke, the second yoke, and thecoil, is also formed. Accordingly, the thrust force, which acts on thepermanent magnet, is generated depending on the direction of the currentand the directions of the respective magnetic fluxes passing through therespective magnetic paths. The permanent magnet, the first yoke, and theslider are displaced and guided by the guide member.

When attempting to reduce the thickness of the linear electromagneticactuator, which is disclosed in Japanese Laid-Open Patent PublicationNos. 5-227729 and 10-290560, the cross-sectional area of the magneticpath is decreased at the first yoke and the second yoke, and localmagnetic saturation occurs in the first yoke and the second yoke. As aresult, leakage magnetic flux is generated from the first yoke and thesecond yoke, and the thrust force, which acts on the permanent magnet,is lowered. Further, due to the leakage magnetic flux, some kind ofmalfunction may occur in the electronic apparatus and the electroniccircuit disposed around the linear electromagnetic actuator. Also,attraction of a magnetic member disposed around the linearelectromagnetic actuator to the linear electromagnetic actuator mayoccur as well as malfunction of the electronic circuit and the encoderarranged in the linear electromagnetic actuator.

Further, dust, which is composed of the magnetic member, may be adheredto the guide member by the magnetic flux passing through the magneticpath, thereby increasing the sliding resistance of the guide member withrespect to the slider. As a result, it is difficult to smoothly displacethe slider, and dust escaping out from the linear electromagneticactuator may pollute the surrounding environment.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a linearelectromagnetic actuator which suppresses the occurrence of magneticsaturation in a yoke.

The above and other objects, features, and advantages of the presentinvention will become more apparent from the following description whentaken in conjunction with the accompanying drawings in which a preferredembodiment of the present invention is shown by way of illustrativeexample.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view illustrating a linear electromagneticactuator according to an embodiment of the present invention;

FIG. 2 is an exploded perspective view illustrating the linearelectromagnetic actuator shown in FIG. 1;

FIG. 3 is a sectional view taken along a line shown in FIG. 1;

FIG. 4 is a sectional view taken along a line IV-IV shown in FIG. 1;

FIG. 5 is a sectional view in which first and fourth magnetic paths aresuperimposed on the linear electromagnetic actuator shown in FIG. 3;

FIG. 6 is a sectional view in which second, third, fifth, and sixthmagnetic paths are superimposed on the linear electromagnetic actuatorshown in FIG. 4;

FIG. 7 is a perspective view illustrating major parts of a simulationmodel used in a Comparative Example;

FIG. 8 is a perspective view illustrating major parts of a simulationmodel used in a Working Example;

FIG. 9 is a perspective view illustrating major parts of a magnetic fluxdistribution in the simulation model shown in FIG. 7;

FIG. 10 is a perspective view illustrating major parts of a magneticflux distribution in the simulation model shown in FIG. 8;

FIG. 11 is a perspective view illustrating grooves formed on projectionsand a guide rail of the linear electromagnetic actuator;

FIG. 12 is a sectional view illustrating the manner in which a coil isprovided on a slide table, and permanent magnets are provided on theguide rail;

FIG. 13A is a sectional view illustrating the manner in which first andsecond projections are omitted, and FIG. 13B is a sectional viewillustrating the manner in which third and fourth projections areomitted;

FIG. 14A is a sectional view illustrating the manner in which the thirdand fourth projections are provided outside of the first and secondprojections, and FIG. 14B is a sectional view illustrating the manner inwhich the third and fourth projections are provided inside of the firstand second projections;

FIGS. 15A and 15B are sectional views illustrating the manner in whichthe slide table and the first and second projections are providedseparately, and the guide rail and the third and fourth projections areprovided separately;

FIG. 16 is a sectional view illustrating a linear guide provided outsideof the first through fourth projections;

FIG. 17 is a sectional view illustrating the linear guide providedinside of the first through fourth projections;

FIG. 18 is a sectional view illustrating the liner guide interposedbetween the first and second projections and the third and fourthprojections;

FIG. 19 is a sectional view illustrating the liner guide interposedbetween the first and second projections and the third and fourthprojections;

FIG. 20 is a sectional view taken along a line XX-XX shown in FIG. 19;and

FIG. 21 is a sectional view taken along a line XXI-XXI shown in FIG. 19.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

As shown in FIGS. 1 to 4, a linear electromagnetic actuator 10 has afixed section 14 in which a coil 12 is arranged, and a movable section18 in which two permanent magnets 16 a, 16 b are arranged facing thecoil 12.

The fixed section 14 includes a guide rail (second yoke) 20 which has asubstantially U-shaped cross section, a coil 12 which is arranged at asubstantially central portion of the upper surface of the guide rail 20,and a circuit board 26 made of resin on which an encoder 22 and anelectronic circuit 24 are mounted.

Projections (third and fourth projections) 28 a, 28 b, which protrudefrom the base of the guide rail 20 toward the movable section 18, areformed on the both sides of the guide rail 20. Guide grooves 30 a, 30 b,which extend in the direction of the arrow A as shown in FIGS. 1 to 3,are formed at inner portions of the projections 28 a, 28 b,respectively. A plurality of balls (first and second guide members) 32a, 32 b, which serve as rolling members, are arranged in the guidegrooves 30 a, 30 b. In this arrangement, the guide rail 20 has a widthwhich is wider than that of a slide table (first yoke) 46 of the movablesection 18. Each of the projections 28 a, 28 b of the guide rail 20 isformed outside of projections (first and second projections) 74 a, 74 bof the slide table 46 (see FIG. 4). It is preferable that the wallthickness of each of the guide rail 20 and the projections 28 a, 28 b isthinner than the width d (see FIG. 3) of each of permanent magnets 16 a,16 b in the direction of the arrow A.

The coil 12 is a hollow core coil formed by mold forming with aninsulating member 34 composed of resin by winding a conductive elementwire coated with an insulating film.

A recess 36, which is indented upwardly, is formed at the bottom of oneend of the guide rail 20 (the side of the direction of the arrow A1).The circuit board 26 is fitted into the recess 36. The circuit board 26is fixed to the guide rail 20 by a screw 44 screwed into a hole 38formed through the circuit board 26 and a hole 40 formed through theguide rail 20. The recess 36 has a cutout 42. The electronic circuit 24is fitted into the cutout 42. A hole 43 is formed in the recess 36 nearthe coil 12. The encoder 22 is inserted into the hole 43.

The electronic circuit 24 is electrically connected to the element wireof the coil 12 and the encoder 22 respectively. The current is suppliedto the electric wire based on the control signal from an unillustratedexternal apparatus. Further, the electric signal, which is inputted intothe encoder 22, is outputted to the external apparatus.

The encoder 22 faces a scale 48 which is arranged on the bottom surfaceof the slide table 46 of the movable section 18. When the movablesection 18 is displaced in the direction of the arrow A, then thereflected light of the light emitted to the scale 48 is received, andthe displacement amount of the movable section 18 is calculated based onthe amount of the reflected light. The calculated result is outputted asthe electric signal to the electronic circuit 24.

A bridge member 50 over the electronic circuit 24 is arranged on one endof the guide rail 20. A ball-fastening member 52 having a substantiallyU-shaped cross section, which prevents the balls 32 a, 32 b from fallingout, is fixed to the bridge member 50 by screws 54.

A ball-fastening member 56 having a substantially U-shaped crosssection, which prevents the balls 32 a, 32 b from falling out togetherwith the ball-fastening member 52, is fixed on the other end of theguide rail 20 by screws 58.

A stopper 60, which prohibits further displacement of the movablesection 18 when the movable section 18 is displaced in the direction ofthe arrow A1, is fixed by a screw 62 on the upper surface of the guiderail 20 between the ball-fastening member 56 and the coil 12. In thisarrangement, the stopper 60 makes abutment against the side surface ofan end block 72 which is connected to the other end of the slide table46 by unillustrated screws. Accordingly, the movable section 18 isprevented from displacement in the direction of the arrow A1 of theguide rail 20. FIGS. 1 and 3 show a state in which the stopper 60 abutsagainst the end block 72 to stop the movement of the movable section 18in the direction of the arrow A1.

As shown in FIG. 2, a plurality of screw holes 66, which have a diameterlarger than that of the hole 40, are formed on the one end and the otherend of the guide rail 20. The guide rail 20 can be fixed to anothermember by screwing unillustrated screws into the respective screw holes66.

Meanwhile, as shown in FIGS. 1 to 4, the movable section 18 includes theslide table 46 which has a substantially U-shaped cross section, arectangular plate-shaped member 70 which is fixed by screws 68 to oneend of the slide table 46 in the direction of the arrow A1, the endblock 72 which is fixed by unillustrated screws to the other end of theslide table 46 in the direction of the arrow A2, the two permanentmagnets 16 a, 16 b which face the coil 12 and which are disposed atsubstantially central portions of the bottom surface of the slide table46, the scale 48 face the encoder 22 and which is disposed on the bottomsurface of the slide table 46, and a stopper 73 which is arranged on thebottom surface of the slide table 46 in the vicinity of the permanentmagnet 16 a.

The width of the slide table 46 is designed to be smaller than the widthof the guide rail 20. The projections (first and second projections) 74a, 74 b, which protrude from the base of the slide table 46 toward thefixed section 14, are formed on the both sides of the slide table 46.Guide grooves 76 a, 76 b, in which the balls 32 a, 32 b are arranged,are formed along the direction of the arrow A outside of the projections74 a, 74 b respectively. In this arrangement, the slide table 46 and theguide rail 20 are connected to each other by the balls 32 a, 32 b (seeFIG. 4).

That is, in the linear electromagnetic actuator 10, the guide rail 20and the slide table 46 are arranged so that the height of the guidegrooves 76 a, 76 b is substantially the same as the height of the guidegrooves 30 a, 30 b. The plurality of balls 32 a, 32 b, which serve asthe linear guide having a finite length, are accommodated in theclearances formed by the guide grooves 76 a, 76 b and the guide grooves30 a, 30 b. Therefore, the movable section 18 is displaceable in thedirection of the arrow A with respect to the fixed section 14 under theguiding action based on the rotation of the respective balls 32 a, 32 b.

The permanent magnets 16 a, 16 b, which are substantially rectangular,are magnetized in mutually different directions (for example, indifferent vertical directions), and are fixed to the bottom surface ofthe slide table 46 while being separated from each other by apredetermined distance. In this arrangement, the width of each of thepermanent magnets 16 a, 16 b is designed to be narrower than the widthof the coil 12.

The width of the plate-shaped member 70 is set so that when the movablesection 18 is displaced in the direction of the arrow A2, theplate-shaped member 70 makes abutment against the balls 32 a, 32 bdisposed in the direction of the arrow A1.

A plurality of screw holes 78 are formed on one end and the other end ofthe slide table 46. Another member can be fixed to the slide table 46screwing screws into the respective screw holes 78. Meanwhile,unillustrated screw holes are formed on the side surface of the endblock 72 in the direction of the arrow A2. Another member can be fixedthereto by screwing screws into the screw holes.

The stopper 73 makes abutment against the side surface of the stopper 60in the direction of the arrow A1. Accordingly, the guide rail 20 isprevented from displacing in the direction of the arrow A2.

In the linear electromagnetic actuator 10 as described above, the guiderail 20 and the slide table 46 are composed of magnetic members. Thebridge member 50, the ball-fastening members 52, 56, the stopper 60, theplate-shaped member 70, the end block 72, and the screws 44, 54, 58, 62,68 are composed of nonmagnetic members. The spherical members, which areused as the balls 32 a, 32 b, include steel balls (first rollingmembers) 33 composed of magnetic members, and spherical members (secondrolling members) 35 composed of nonmagnetic members. As shown in FIG. 2,the steel balls 33 and the spherical members 35 composed of thenonmagnetic members are alternately arranged along the direction of thearrow A.

The linear electromagnetic actuator 10 according to the embodiment ofthe present invention is basically constructed as described above. Next,its operation will be explained with reference to FIGS. 1 to 6.

Firstly, an explanation will be made about a case (Case 1) in which themovable section 18 is displaced in the direction of the arrow A2 in astate in which the movable section 18 is positioned as shown in FIGS. 1,2, and 5 with respect to the fixed section 14.

In Case 1, when no current is supplied to the coil 12, the followingmagnetic paths (first to third magnetic paths) 80 a to 80 c, throughwhich the respective magnetic fluxes pass, are formed in the linearelectromagnetic actuator 10 by the magnetic fluxes generated by thepermanent magnets 16 a, 16 b (see FIGS. 5 and 6).

The first magnetic path 80 a includes the following: a first route 82 apassing through the permanent magnet 16 a, the slide table 46, theclearance between the other end of the slide table 46 and the other endof the guide rail 20, the base of the guide rail 20, the coil 12, thegap between the coil 12 and the permanent magnet 16 a, and the permanentmagnet 16 a; a second route 82 b passing through the permanent magnet 16a, the slide table 46, the permanent magnet 16 b, the gap between thepermanent magnet 16 b and the coil 12, the coil 12, the base of theslide table 46, the coil 12, the gap between the permanent magnet 16 aand the coil 12, and the permanent magnet 16 a; and a third route 82 cpassing through the permanent magnet 16 b, the slide table 46, theclearance between one end of the slide table 46 and one end of the guiderail 20, the base of the guide rail 20, the coil 12, the gap between thecoil 12 and the permanent magnet 16 b, and the permanent magnet 16 b.

The second magnetic path 80 b passes through the permanent magnets 16 a,16 b, the slide table 46, the first projection 74 a of the slide table46, the balls 32 a (steel balls 33), the third projection 28 a of theguide rail 20, the base of the guide rail 20, the coil 12, the gapbetween the coil 12 and the permanent magnets 16 a, 16 b, and thepermanent magnets 16 a, 16 b.

The third magnetic path 80 c passes through the permanent magnets 16 a,16 b, the slide table 46, the second projection 74 b of the slide table46, the balls 32 b (steel balls 33), the fourth projection 28 b of theguide rail 20, the base of the guide rail 20, the coil 12, the gapbetween the coil 12 and the permanent magnets 16 a, 16 b, and thepermanent magnets 16 a, 16 b.

Meanwhile, when the current is applied to the element wire of the coil12 from the electronic circuit 24 (see FIGS. 1 to 3 and 5), then thecoil 12 generates the magnetic flux by the current, and the followingmagnetic paths (fourth to sixth magnetic paths) 80 d to 80 f are formedby the magnetic flux in the linear electromagnetic actuator 10 inaddition to the first to third magnetic paths 80 a to 80 c describedabove.

The fourth magnetic path 80 d includes the following: a fourth route 82d passing through the coil 12, the gap between the coil 12 and thepermanent magnets 16 a, 16 b, the permanent magnets 16 a, 16 b, theslide table 46, the clearance between one end of the slide table 46 andone end of the guide rail 20, the base of the guide rail 20, and thecoil 12; and a fifth route 82 e passing through the coil 12, the gapbetween the coil 12 and the permanent magnets 16 a, 16 b, the permanentmagnets 16 a, 16 b, the clearance between the other end of the slidetable 46 and the guide rail 20, the base of the guide rail 20, and thecoil 12.

The fifth magnetic path 80 e passing through the coil 12, the gapbetween the coil 12 and the permanent magnets 16 a, 16 b, the permanentmagnets 16 a, 16 b, the slide table 46, the first projection 74 a of theslide table 46, the balls 32 a (steel balls 33), the third projection 28a of the guide rail 20, the base of the guide rail, and the permanentmagnets 16 a, 16 b.

The sixth magnetic path 80 f passing through the coil 12, the gapbetween the coil 12 and the permanent magnets 16 a, 16 b, the permanentmagnets 16 a, 16 b, the slide table 46, the second projection 74 b ofthe slide table 46, the balls 32 b (steel balls 33), the fourthprojection 28 b of the guide rail 20, the base of the guide rail, andthe coil 12.

The thrust force (Lorentz force), which is directed in the direction ofthe arrow A1 based on the Fleming's left hand rule, is generated in thecoil 12 depending on the directions of the respective magnetic fluxespassing through the first to sixth magnetic paths 80 a to 80 f and thedirection of the current supplied to the element wire of the coil 12.When the guide rail 20 of the fixed section 14 is fixed by anothermember, the thrust force, which is directed in the direction of thearrow A2 based on the thrust force, acts on the movable section 18. Themovable section 18 is displaced in the direction of the arrow A2 underthe guiding action based on the rotation of the balls 32 a, 32 b. Themovable section 18 stops at the position at which the stopper 60 abutsagainst the stopper 73.

The arrows of the first to sixth magnetic paths 80 a to 80 f in FIGS. 5and 6 indicate the directions of the passage of the magnetic fluxgenerated when the current is allowed to flow through the coil 12 andthe magnetic fluxes generated by the permanent magnets 16 a, 16 b.

Next, an explanation will be made about a case (Case 2) in which themovable section 18, which protrudes from the fixed section 14 in thedirection of the arrow A2, is displaced to the position shown in FIGS.1, 3, and 5.

In Case 2, the current, which flows in the opposite direction (oppositephase) with respect to the current of Case 1, is supplied from theelectronic circuit 24 to the element wire of the coil 12.

In this case, the direction of the magnetic flux generated by the coil12 is opposite to the direction of the magnetic flux generated by thecoil 12 in Case 1. Therefore, the thrust force, which is directed in thedirection of the arrow A1 based on the Fleming's left hand rule, isgenerated in the permanent magnets 16 a, 16 b depending on thedirections of the respective magnetic fluxes passing through the firstto sixth magnetic paths 80 a to 80 f and the direction of the currentallowed to flow through the element wire of the coil 12. Accordingly,the movable section 18 is displaced in the direction of the arrow A1under the guiding action based on the rotation of the balls 32 a, 32 b.The movable section 18 stops at the position shown in FIGS. 1, 3, and 5at which the side surface of the end block 72 abuts against the sidesurface of the stopper 60.

Next, an explanation will be made with reference to FIGS. 7 to 10 aboutresults of the simulation of the magnetic flux density distribution inthe linear electromagnetic actuator 10.

In this simulation, comparison is made of the magnetic flux densitydistribution obtained when the current is allowed to flow through theelement wire of the coil 12 to generate the magnetic flux in relation toa case in which the first and second projections 74 a, 74 b of the slidetable 46 and the third and fourth projections 28 a, 28 b of the guiderail 20 are composed of nonmagnetic members (resin) as shown in FIG. 7(hereinafter referred to as “Comparative Example”) and a case in whichthe first and second projections 74 a, 74 b of the slide table 46 andthe third and fourth projections 28 a, 28 b of the guide rail 20 arecomposed of magnetic members as shown in FIG. 8 (hereinafter referred toas “Working Example”). The Comparative Example is an example of thelinear electromagnetic actuator concerning the conventional technique,and the Working Example in an example of the linear electromagneticactuator 10 according to the embodiment of the present invention.

In order to simplify the calculation of the magnetic flux densitydistribution in the simulation, the balls 32 a, 32 b and the guidegrooves 30 a, 30 b, 76 a, 76 b are omitted, and the first to fourthprojections 28 a, 28 b, 74 a, 74 b are designed to have an L-shapedcross section.

FIG. 9 shows the magnetic flux density distribution in relation to theslide table 46 of the Comparative Example, and FIG. 10 shows themagnetic flux density distribution in relation to the slide table 46 ofthe Working Example. In the magnetic flux density distributions shown inFIGS. 9 and 10, the larger the density of the hatching is, the largerthe magnetic flux density is. In of the magnetic flux densitydistribution of the

Comparative Example shown in FIG. 9, the magnetic flux density islocally high at portions of the slide table 46 in the vicinity of thepermanent magnets 16 a, 16 b, and magnetic saturation occurs at theseportions. That is, in Comparative Example, only the first magnetic path80 a and the fourth magnetic path 80 d (see FIG. 5) are provided in thelinear electromagnetic actuator, because the first to fourth projections28 a, 28 b, 74 a, 74 b are composed of the nonmagnetic members (resin)(see FIG. 7). As a result, magnetic flux concentration and magneticsaturation occur at the portions as described above due to the magneticfluxes generated by the permanent magnets 16 a, 16 b and the magneticflux generated by the coil 12.

On the contrary, in the magnetic flux density distribution of theWorking Example shown in FIG. 10, the magnetic flux density is loweredat the portions of the slide table 46 in the vicinity of the permanentmagnets 16 a, 16 b as compared with the magnetic flux density of theComparative Example (see FIG. 9). Further, the magnetic flux densitydistribution covers a wide range including the base of the slide table46 and the first and second projections 74 a, 74 b.

That is, in the Working Example, the first to fourth projections 28 a,28 b, 74 a, 74 b are composed of the magnetic members (see FIG. 8).Therefore, the first to sixth magnetic paths 80 a to 80 f are formed inthe linear electromagnetic actuator 10 (see FIGS. 5 and 6). As a result,the magnetic fluxes generated by the permanent magnets 16 a, 16 b andthe magnetic flux generated by the current allowed to flow through thecoil 12 are divided by the first to sixth magnetic paths 80 a to 80 f topass through the slide table 46. Accordingly, it is possible to suppresslocal magnetic flux concentration and the occurrence of magneticsaturation in the slide table 46.

As described above, in the case of the linear electromagnetic actuator10 according to the embodiment of the present invention, the first andsecond projections 74 a, 74 b are formed to protrude from the slidetable 46 as the first yoke toward the guide rail 20 as the second yoke.The first and second projections 74 a, 74 b are slightly separated fromthe guide rail 20.

When no current is allowed to flow through the coil 12, the firstmagnetic path 80 a is formed by the magnetic fluxes generated by thepermanent magnets 16 a, 16 b in the linear electromagnetic actuator 10.The first magnetic path 80 a includes the following: the first route 82a passing through the permanent magnet 16 a, the slide table 46, theclearance between the other end of the slide table 46 and the other endof the guide rail 20, the base of the guide rail 20, the coil 12, thegap between the coil 12 and the permanent magnet 16 a, and the permanentmagnet 16 a; the second route 82 b passing through the permanent magnet16 a, the slide table 46, the permanent magnet 16 b, the gap between thepermanent magnet 16 b and the coil 12, the coil 12, the base of theslide table 46, the coil 12, the gap between the permanent magnet 16 aand the coil 12, and the permanent magnet 16 a; and the third route 82 cpassing through the permanent magnet 16 b, the slide table 46, theclearance between one end of the slide table 46 and one end of the guiderail 20, the base of the guide rail 20, the coil 12, the gap between thecoil 12 and the permanent magnet 16 b, and the permanent magnet 16 b.

The second magnetic path 80 b is also formed in the linearelectromagnetic actuator 10 in addition to the first magnetic path 80 a,passing through the permanent magnets 16 a, 16 b, the slide table 46,the first projection 74 a of the slide table 46, the balls 32 a (steelballs 33), the third projection 28 a of the guide rail 20, the base ofthe guide rail, the coil 12, the gap between the coil 12 and thepermanent magnets 16 a, 16 b, and the permanent magnets 16 a, 16 b.

Further, the third magnetic path 80 c is also formed, which passesthrough the permanent magnets 16 a, 16 b, the slide table 46, the secondprojection 74 b of the slide table 46, the balls 32 b (steel balls 33),the fourth projection 28 b of the guide rail 20, the base of the guiderail, the coil 12, the gap between the coil 12 and the permanent magnets16 a, 16 b, and the permanent magnets 16 a, 16 b.

Meanwhile, when the current is allowed to flow through the coil 12, thefourth magnetic path 80 d is formed in the linear electromagneticactuator 10. The fourth magnetic path 80 d includes the following: thefourth route 82 d passing through the coil 12, the gap between the coil12 and the permanent magnets 16 a, 16 b, the permanent magnets 16 a, 16b, the slide table 46, the clearance between one end of the slide table46 and one end of the guide rail 20, the base of the guide rail 20, andthe coil 12; and the fifth route 82 e passing through the coil 12, thegap between the coil 12 and the permanent magnets 16 a, 16 b, thepermanent magnets 16 a, 16 b, the slide table 46, the clearance betweenthe other end of the slide table 46 and the other end of the guide rail20, the base of the guide rail 20, and the coil 12.

Further, in addition to the fourth magnetic path 80 d, the following areformed in the linear electromagnetic actuator 10: the fifth magneticpath 80 e passing through the coil 12, the gap between the coil 12 andthe permanent magnets 16 a, 16 b, the permanent magnets 16 a, 16 b, theslide table 46, the first projection 74 a of the slide table 46, theballs 32 a (steel balls 33), the third projection 28 a of the guide rail20, the base of the guide rail, and the permanent magnets 16 a, 16 b;and the sixth magnetic path 80 f passing through the coil 12, the gapbetween the coil 12 and the permanent magnets 16 a, 16 b, the permanentmagnets 16 a, 16 b, the slide table 46, the second projection 74 b ofthe slide table 46, the balls 32 b (steel balls 33), the fourthprojection 28 b of the guide rail 20, the base of the guide rail, andthe coil 12.

In the linear electromagnetic actuator concerning the conventionaltechnique, only the first and fourth magnetic paths 80 a, 80 d areformed. Therefore, the magnetic flux is undesirably concentrated on theguide rail and the slide table, and magnetic saturation occurs.

On the contrary, in the linear electromagnetic actuator 10 according tothe embodiment of the present invention, the magnetic flux generated bythe coil 12 and the magnetic fluxes generated by the permanent magnets16 a, 16 b are divided by the first to sixth magnetic paths 80 a to 80 fto pass through the guide rail 20 and the slide table 46 as describedabove. Therefore, local magnetic flux concentration is avoided in theguide rail 20 and the slide table 46. As a result, magnetic saturationis suppressed. Therefore, occurrence of leakage magnetic flux can beprevented, thereby avoiding malfunctioning of the electronic circuit andthe electronic apparatus arranged internally in or externally of thelinear electromagnetic actuator 10 and also avoiding attraction of themagnetic member to the linear electromagnetic actuator 10. Further, thetotal amount of the magnetic flux passing through the guide rail 20 andthe slide table 46 is increased, and the thrust force to displace thepermanent magnets 16 a, 16 b is increased. Accordingly, the movablesection 18, which includes the permanent magnets 16 a, 16 b, isdisplaceable under the guiding action of the balls 32 a, 32 b.

The first and second projections 74 a, 74 b are slightly separated fromthe guide rail 20. Therefore, it is possible to avoid occurrence ofleakage magnetic flux at the clearances between the guide rail 20 andthe first and second projections 74 a, 74 b.

The third projection 28 a is formed to protrude along the firstprojection 74 a, while the fourth projection 28 b is formed to protrudealong the second projection 74 b. Therefore, the areas, in which theslide table 46 and the guide rail 20 face each other at the first tofourth projections 28 a, 28 b, 74 a, 74 b, are increased. It is possibleto suppress magnetic flux concentration and magnetic saturation at thesecond, third, fifth, and sixth magnetic paths 80 b, 80 c, 80 e, 80 f.

The steel balls 33 composed of the magnetic members are used for a partof the balls 32 a, 32 b. Therefore, the magnetic flux, which passesthrough the second and third magnetic paths 80 b, 80 c, passes throughthe steel balls 33. It is possible to further suppress occurrence ofleakage magnetic flux at the clearances between the first and secondprojections 74 a, 74 b and the third and fourth projections 28 a, 28 b.

In the linear electromagnetic actuator 10 according to the embodiment ofthe present invention, when the movable section 18 is displaced in thedirection of the arrow A under the guiding action of the plurality ofballs 32 a, 32 b, each of the balls 32 a, 32 b are rotated in the samedirection. However, when comparison is made between the mutuallyopposing surfaces of adjacent balls 32 a, 32 b, the balls 32 a, 32 b arerotated in mutually opposite directions.

In this arrangement, the permanent magnets 16 a, 16 b, which arearranged along the direction of the arrow A, are magnetized in mutuallyopposite directions. Therefore, if all of the balls 32 a, 32 b are thesteel balls 33, then the magnetic force, which is based on the magneticflux generated by the permanent magnet 16 b, acts in the direction ofthe arrow A on the steel balls 33 which are arranged on the side in thedirection of the arrow A1 with respect to the center of the linearelectromagnetic actuator 10. Meanwhile, the magnetic force, which isbased on the magnetic flux generated by the permanent magnet 16 a, actsin the direction of the arrow A on the steel balls 33 which are arrangedon the side in the direction of the arrow A2 with respect to the centerof the linear electromagnetic actuator 10. Therefore, the adjacent steelballs 33 contact each other due to magnetic force, and frictionalresistance occurs because of the rotation of the adjacent steel balls 33in the opposite directions. Ultimately, rotation of the steel balls 33are stopped. Therefore, the sliding resistance of the balls 32 a, 32 bagainst the movable section 18 is undesirably increased, and it isdifficult to smoothly displace the movable section 18.

In view of the above, in the linear electromagnetic actuator 10according to the embodiment of the present invention, the balls 32 a, 32b composed of the steel balls 33 and the balls 32 a, 32 b composed ofthe spherical members 35 made of the nonmagnetic members (for example,resin) are alternately arranged along the direction of the arrow A.Accordingly, it is possible to avoid positional deviation of the steelballs 33 which would otherwise occur due to the magnetic force asdescribed above, and it is possible to smoothly displace the movablesection 18.

As described above, the movable section 18 can be smoothly displaced byavoiding positional deviation of the steel balls 33 which wouldotherwise occur due to the magnetic force. Therefore, a plurality ofcylindrical members composed of nonmagnetic members may be arranged inplace of the spherical members 35. Alternatively, the spherical members35 or the cylindrical members may be integrally connected by rod-shapedmembers composed of nonmagnetic members to forcibly prevent positionaldeviation of the steel balls 33 which would otherwise occur due to themagnetic force. Further alternatively, it is preferable that rods orplate members composed of nonmagnetic members are arranged in theclearances between the first to fourth projections 28 a, 28 b, 74 a, 74b, and that the steel balls 33 are arranged in a plurality of holesformed at predetermined intervals in the direction of the arrow A in therods or the plate members. In this arrangement, positional deviation ofthe steel balls 33 in the direction of the arrow A, which wouldotherwise occur due to the magnetic force, can be avoided by the rods orthe plate members.

In the linear electromagnetic actuator 10 according to the embodiment ofthe present invention, it is preferable that cylindrical memberscomposed of magnetic members are arranged in place of the steel balls 33so that the axial direction thereof is substantially coincident with thedirection of the arrow A. This is because when the cylindrical membersare arranged, the cross-sectional areas of the second and third magneticpaths 80 b, 80 c are increased in the cylindrical members, and themagnetic resistance is lowered. As a result, the thrust force, whichacts on the permanent magnets 16 a, 16 b, is further increased.

When the width of the coil 12 is wider than that of the permanentmagnets 16 a, 16 b, the magnetic fluxes, which are generated by thepermanent magnets 16 a, 16 b, can be reliably intersect with the coil12.

When the thickness of the slide table 46 and the guide rail 20 issmaller than the width d of the permanent magnets 16 a, 16 b in thedirection of the arrow A, it is possible to reduce the thickness andsize of the entire apparatus.

For example, when the magnetic flux density, which is brought about bythe permanent magnets 16 a, 16 b, is 0.5 to 0.6 T, and the saturationmagnetic flux density of the iron-based material (pure iron, low carbonsteel, stainless steel) of the guide rail 20 and the slide table 46 toserve as the yokes is 1.4 to 1.8 T, then the magnetic flux, which isabout three times more than the magnetic flux generated by the permanentmagnets 16 a, 16 b, can pass through the guide rail 20 and the slidetable 46.

In the linear electromagnetic actuator 10, the magnetic fluxes, whichare generated by the permanent magnets 16 a, 16 b, can be divided intotwo in the direction of the arrow A in the guide rail 20 and the slidetable 46.

Therefore, in the linear electromagnetic actuator 10, the magnetic flux,which is about six times more than the magnetic flux generated by thepermanent magnets 16 a, 16 b, can pass without causing magneticsaturation in the guide rail 20 and the slide table 46. As a result, thethickness of the guide rail 20 and the slide table 46 can be reduced toabout one-sixth of the width d of the permanent magnets 16 a, 16 b.

In the embodiment of the present invention, the two permanent magnets 16a, 16 b are arranged on the bottom surface of the slide table 46 alongthe direction of the arrow A. However, it is a matter of course that thethrust force for displacing the movable section 18 is further increasedby arranging three or more of the permanent magnets on the slide table46 along the direction of the arrow A.

In the linear electromagnetic actuator concerning the conventionaltechnique, if the entire apparatus is used for a long period of time ina vertical state, then the rolling members as the guide members aremoved downwardly, and hence it is impossible to provide predetermineddistances necessary for the rolling members to rotate. Therefore, evenwhen an attempt is made to move the slide table downwardly, the rollingmembers are moved along the guide rail and the slide plate withoutrotating. As a result, the sliding resistance of the guide member withrespect to the movable section is increased. When the movable section isdisplaced in the vertical direction, it is impossible to smoothlydisplace the movable section.

On the contrary, in the linear electromagnetic actuator 10 according tothe embodiment of the present invention, a part of the balls 32 a, 32 bare the steel balls 33. The magnetic force, which acts downwardly, isgenerated for the balls 32 a, 32 b arranged at the upper positions withrespect to the permanent magnets 16 a, 16 b arranged on the slide table46 in the vertical direction (direction of the arrow A). On the otherhand, the magnetic force, which acts upwardly against gravity, isgenerated for the balls 32 a, 32 b arranged at the lower positions.

As a result, the predetermined clearances can be provided between theadjacent balls 32 a, 32 b. It is possible to rotate the respective balls32 a, 32 b with ease. Therefore, even when the linear electromagneticactuator 10 is used for a long period of time, the movable section 18can be displaced smoothly.

In the linear electromagnetic actuator 10 according to the embodiment ofthe present invention, as shown in FIG. 11, it is preferable to adoptthe following arrangement. That is, projections 84 a, 84 b are formed toprotrude outwardly in the direction perpendicular to the direction ofthe arrow A from the both sides of the slide table 46. Grooves 86 areformed on the bottom surfaces of the projections 84 a, 84 b, on theupper portions of the third and fourth projections 28 a, 28 b, on thebottom portions of the first and second projections 74 a, 74 b, and onthe upper portions of the guide rail 20 facing the bottom portions.

That is, leakage magnetic fluxes are generated in the grooves 86, andthe leakage magnetic fluxes make it possible for the grooves 86 toattract dust composed of the magnetic members collected on the balls 32a, 32 b and the dust of the magnetic members generated by the rotationof the steel balls 33. As a result, the balls 32 a, 32 b can beprevented from adhesion of dust. The movable section 18 can be displacedsmoothly under the guiding action of the balls 32 a, 32 b. Further, itis possible to avoid pollution of the surrounding environment bysuppressing dust from escaping from the linear electromagnetic actuator10 to the outside.

In the embodiment of the present invention, as shown in FIGS. 2 through6, the permanent magnets 16 a, 16 b are arranged on the bottom surfaceof the slide table 46 while the coil 12 is arranged on the upper surfaceof the guide rail 20. Alternatively, as shown in FIG. 12, the coil 12may be arranged on the bottom surface of the slide table 46 while thepermanent magnets 16 a, 16 b may be arranged on the upper surface of theguide rail 20. The same advantages as mentioned above are achieved alsoin this arrangement.

In the embodiment of the present invention, as shown in FIGS. 2, 4 and6, the first and second projections 74 a, 74 b are formed on both sidesof the slide table 46 while the third and fourth projections 28 a, 28 bare formed on both sides of the guide rail 20. Alternatively, as shownin FIG. 13A, only the third and fourth projections 28 a, 28 b may beformed. Further, as shown in FIG. 13B, only the first and secondprojections 74 a, 74 b may be formed. The same advantages as mentionedabove are achieved also in these structures. In FIG. 13A, the balls 32 aand 32 b are interposed between the third and fourth projections 28 a,28 b and the bottom surface of the slide table 46, respectively. In FIG.13B, the balls 32 a and 32 b are interposed between the first and secondprojections 74 a, 74 b and the upper surface of the guide rail 20,respectively.

Alternatively, as shown in FIG. 14A, the first and second projections 74a, 74 b may be formed inside of the third and fourth projections 28 a,28 b. Further alternatively, as shown in FIG. 14B, the third and fourthprojections 28 a, 28 b may be formed inside of the first and secondprojections 74 a, 74 b. The same advantages as mentioned above areachieved also in these structures.

In the embodiment of the present invention, as shown in FIGS. 2, 4 and6, the first and second projections 74 a, 74 b are formed integrallywith the slide table 46 while the third and fourth projections 28 a, 28b are formed integrally with the guide rail 20. Alternatively, as shownin FIGS. 15A, 15B, the first and second projections 74 a, 74 b may befixed to both sides of the slide table 46 with screws 100 a, 100 b,respectively, and the third and fourth projections 28 a, 28 b may befixed to both sides of the guide rail 20 with screws 102 a, 102 b,respectively. The same advantages as mentioned above are achieved alsoin these structures. In FIG. 15A, the first and second projections 74 a,74 b are arranged inside of the third and fourth projections 28 a, 28 b.In FIG. 15B, the third and fourth projections 28 a, 28 b are arrangedinside of the first and second projections 74 a, 74 b.

In the embodiment of the present invention, as shown in FIGS. 2, 4 and6, the balls 32 a and 32 b, which serve as rolling members, areinterposed between the slide table 46 and the guide rail 20,respectively. Alternatively, as shown in FIGS. 16 through 18, a linearguide 112 or 124 may be arranged instead of the balls 32 a, 32 b. Inthis structure, the movable section 18 may be displaced with respect tothe fixed section 14 while guided by the linear guide 112 or 124.

In FIG. 16, the linear guide 112 is arranged outside of the firstthrough fourth projections 28 a, 28 b, 74 a, 74 b. A guide rail 110 ofthe linear guide 112 is fixed to the upper surface of the guide rail 20with a screw 106. A slide table 108 is fixed to the bottom surface ofthe slide table 46 with a screw 104. In FIG. 17, the linear guide 112 isarranged inside of the first and second projections 74 a, 74 b, andarranged at the upper portions of the third and fourth projections 28 a,28 b.

In FIG. 18, the linear guide 124 has a support member 126, a supportmember 128, a roller (or rollers) 130, and a limit member 132. Thesupport member 126 has a substantially U-shaped cross section, and isfixed to the slide table 46 with a screw 120 at a portion inside of thefirst and second projections 74 a, 74 b. The support member 128 has asubstantially U-shaped cross section, and is fixed to the guide rail 20with a screw 122 at a portion outside of the third and fourthprojections 28 a, 28 b. The roller 130 is a substantially cylindricalmagnetic member, and supported between the support members 126 and 128.The limit member 132 limits the vertical movement or the movement in thedirection of the arrow A (see FIGS. 1 through 3) of the roller 130. Thelimit member 132 also functions as a holding member for holding theroller 130. In this structure, the contact portions between the supportmember 126 and the roller 130, where the support member 126 faces thesupport member 128, are tapered to the third and fourth projections 28a, 28 b. Also, the contact portions between the support member 128 andthe roller 130, where the support member 128 faces the support member126, are tapered to the first and second projections 74 a, 74 b. Thus,the slide table 46 connected to the support member 126 is displaceablewith respect to the guide rail 20 under the guiding action of the roller130.

As shown in FIGS. 16 through 18, the linear guides 112, 124 are arrangedin the vicinity of the first through fourth projections 28 a, 28 b, 74a, 74 b. Then, leakage magnetic fluxes are generated in the gap betweenthe first and second projections 74 a, 74 b and the third and fourthprojections 28 a, 28 b. The leakage magnetic fluxes make it possible forthe gap to attract dust composed of the magnetic members collected onthe linear guides 112, 124 and dust composed of magnetic membersgenerated by the linear guides 112, 124 when the linear guides 112, 124are magnetic members. As a result, the linear guides 112, 124 can beprevented from adhesion of dust. The slide table 46 can be displacedsmoothly under the guiding action of the linear guides 112, 124.

Alternatively, as shown in FIGS. 19 through 21, a recess 144 may beformed in the side of each of the first and second projections 74 a, 74b, while a recess 150 may be formed in the side of each of the third andfourth projections 28 a, 28 b. Then, a guide member 140 having theroller 130 and the limit member 132, or having a pinion 142 may beinterposed between the recesses 144 and 150.

In this structure, racks 146, 148 made up of a plurality of cylindricalmembers are arranged in the recesses 144, 150 in the direction of thearrow A (see FIG. 20), so that the pinion 142 is engageable with theracks 146, 148. Parts of the recesses 144, 150 which contact the rollers130 are tapered. As a result, the slide table 46 can be displacedsmoothly on the guide rail 20 under the guiding action of the rollers130 and the engaging action between the pinion 142 and the racks 146,148. Since the pinion 142 engages with the racks 146, 148, thepositional deviation of the limit member 132 can be avoided. As shown inFIGS. 19 and 21, the rollers 130 are slanted alternately in thedirection of the arrow A.

In FIGS. 18 through 21, the slide table 46 is displaced with respect tothe guide rail 20 under the guiding action of the rollers 130.Alternatively, the slide table 46 can be displaced when the balls 32 a,32 b as steel balls may be arranged instead of the rollers 130.

It is a matter of course that the linear electromagnetic actuatoraccording to the present invention is not limited to the embodimentdescribed above, which may be embodied in other various forms withoutdeviating from the gist or essential characteristics of the presentinvention.

1. A linear electromagnetic actuator for displacing a movable sectionincluding permanent magnets by a thrust force generated by allowing acurrent to flow through a coil of a fixed section, wherein said movablesection has a first yoke for supporting said permanent magnets, saidfixed section has a second yoke for supporting said coil facing saidpermanent magnets while being separated therefrom, a first projectionand a second projection are formed on both sides of said first yoke toprotrude in a direction of displacement of said movable section towardsaid second yoke, said first projection and said second projection areslightly separated from said second yoke, a first guide member isinterposed between said first projection and said second yoke, and asecond guide member is interposed between said second projection andsaid second yoke.
 2. The linear electromagnetic actuator according toclaim 1, wherein a third projection and a fourth projection are formedon both sides of said second yoke to protrude along said firstprojection and said second projection toward said first yoke, said firstguide member is interposed between said first projection and said thirdprojection, and said second guide member is interposed between saidsecond projection and said fourth projection.
 3. The linearelectromagnetic actuator according to claim 2, wherein said second yokehas a width which is wider than that of said first yoke, guide groovesare formed at outer portions of said first projection and said secondprojection in said direction of displacement of said movable section,guide grooves are formed at inner portions of said third projection andsaid fourth projection in said direction of displacement of said movablesection, said first yoke and said second yoke are arranged so that saidguide grooves have substantially the same height, and said first guidemember and said second guide member are accommodated in clearancesformed by said guide grooves.
 4. The linear electromagnetic actuatoraccording to claim 1, wherein each of said first guide member and saidsecond guide member is composed of a plurality of rolling members, and apart of said rolling members are first rolling members composed ofmagnetic members.
 5. The linear electromagnetic actuator according toclaim 4, wherein said first rolling members are steel balls orcylindrical members whose axial direction is the same as said directionof displacement of said movable section.
 6. The linear electromagneticactuator according to claim 4, wherein each of said first guide memberand said second guide member comprises said first rolling members andsecond rolling members composed of nonmagnetic members, and said firstand second rolling members are arranged alternately along said directionof displacement of said movable section.
 7. The linear electromagneticactuator according to claim 6, wherein said second rolling members arespherical members, cylindrical members, or a plurality of sphericalmembers or cylindrical members which are integrally connected to eachother by rod-shaped members composed of nonmagnetic members.
 8. Thelinear electromagnetic actuator according to claim 1, wherein each ofsaid first guide member and said second guide member is constructed by aplurality of first rolling members composed of magnetic members whichare arranged in a plurality of holes formed at predetermined intervalsin plate members or rods composed of nonmagnetic members.
 9. The linearelectromagnetic actuator according to claim 1, wherein said coil has awidth which is wider than that of said permanent magnets.
 10. The linearelectromagnetic actuator according to claim 1, wherein said first yokeand said second yoke have widths which are smaller than that of saidpermanent magnets in said direction of displacement.
 11. The linearelectromagnetic actuator according to claim 1, wherein grooves, whichaccumulate dust composed of magnetic members, are formed in the vicinityof said first guide member and said second guide member of said firstyoke and said second yoke.
 12. The linear electromagnetic actuatoraccording to claim 11, wherein projections, which protrude in directionsperpendicular to said direction of displacement of said movable section,are formed on both sides of said first yoke, and said grooves are formedat portions of said projections facing said second yoke, portions ofsaid first projection and said second projection facing said secondyoke, and portions of said second yoke facing said projections and saidfirst and second projections respectively.
 13. The linearelectromagnetic actuator according to claim 1, wherein a fasteningmember, which prevents said first guide member and said second guidemember from falling out, is arranged on one end of said second yoke insaid direction of displacement of said movable section, and a fasteningmember, which prevents said first guide member and said second guidemember from falling out, is arranged on the other end of said secondyoke.
 14. The linear electromagnetic actuator according to claim 13,wherein a stopper is arranged on said other end of said second yoke, andan end block and a stopper, which limit displacement of said movablesection in cooperation with said stopper, are arranged on said firstyoke.
 15. The linear electromagnetic actuator according to claim 13,wherein a plate-shaped member, which is capable of making abutmentagainst said first guide member and said second guide member disposed atsaid one end of said second yoke when said movable section is displacedtoward said other end of said second yoke, is arranged on said firstyoke.
 16. The linear electromagnetic actuator according to claim 1,wherein said permanent magnets are arranged along said direction ofdisplacement of said movable section.
 17. The linear electromagneticactuator according to claim 1, wherein screw holes, which fix said fixedsection or said movable section to another member, are formed in saidfixed section or said movable section.
 18. The linear electromagneticactuator according to claim 1, wherein a scale is arranged on a surfaceof said first yoke on a side of said second yoke, an encoder is arrangedon said second yoke facing said scale, and said encoder receivesreflected light with respect to light emitted toward said scale whensaid movable section is displaced so that a displacement amount of saidmovable section is calculated based on an amount of said reflectedlight.
 19. The linear electromagnetic actuator according to claim 2,wherein support members, which are substantially U-shaped in crosssection, are disposed on each of said first yoke and said second yoke, afirst pair of said support members being arranged at portions on saidfirst and second projections such that openings of said first pair ofsupport members face inwardly, and a second pair of said support membersbeing arranged on portions of said third and fourth projections suchthat openings of said second pair of support members face outwardly inconfronting relation to the openings of said first pair of supportmembers, and said first guide members and said second guide members aredisposed between said first pair of support members and said second pairof support members.
 20. A linear electromagnetic actuator for displacinga movable section respective to a fixed section by a thrust forcegenerated by allowing a current to flow through a coil, wherein saidmovable section has a first yoke, said fixed section has a second yoke,guide members are interposed between said fixed section and said movablesection, projections are provided on at least one of said first yoke andsaid second yoke along a direction of displacement of said movablesection, if said projections are provided on said first yoke, saidprojections face said second yoke, while if said projections areprovided on said second yoke, said projections face said first yoke, andif said coil is arranged on said first yoke, permanent magnets arearranged on said second yoke, while if said coil is arranged on saidsecond yoke, said permanent magnets are arranged on said first yoke. 21.A linear electromagnetic actuator according to claim 20, wherein saidprojections are integrally formed on said first yoke or said secondyoke, or alternatively, said projections are magnetic members providedon said first yoke or said second yoke.
 22. A linear electromagneticactuator according to claim 20, wherein said guide members are sphericalor cylindrical rolling members.
 23. A linear electromagnetic actuatoraccording to claim 22, wherein a holding member is provided along saiddirection of displacement of said movable section between said movablesection and said fixed section, said holding member holding said rollingmembers.
 24. A linear electromagnetic actuator according to claim 23,wherein a rack is provided along said direction of displacement of saidmovable section on at least one of said movable section and said fixedsection, and a pinion is supported by said holding member for engagingwith said rack.
 25. The linear electromagnetic actuator according toclaim 20, wherein support members, which are substantially U-shaped incross section, are disposed on at least one of said first yoke and saidsecond yoke, a first pair of said support members being arranged onportions of said projections such that openings of said first pair ofsupport members face either inwardly or outwardly, and a second pair ofsaid support members being arranged such that openings of said secondpair of support members face in confronting relation to the openings ofsaid first pair of support members, and said guide members are disposedbetween said first pair of support members and said second pair ofsupport members.